Title:
OPTICAL MEASUREMENT DEVICE AND OPTICAL MEASUREMENT DEVICE OSCILLATION CORRECTION METHOD
Document Type and Number:
Japanese Patent JP2019196955
Kind Code:
A
Abstract:
To reduce an impact of oscillation that affects a measurement result in an optical measurement device.SOLUTION: In an optical measurement device of the present invention, the optical measurement device is configured to: arrange a sensor monitoring oscillation in a scan head irradiating an observation object with light; adjust a length of an optical path in the optical measurement device on the basis of a distance, to be varied due to the oscillation, between the observation object and the scan head; control a scan mechanism scanning the light with which the observation object is irradiated in accordance with the oscillation; and thereby reduce an impact of the oscillation.SELECTED DRAWING: Figure 8
Inventors:
KISHIMA KOICHIRO
Application Number:
JP2018090444A
Publication Date:
November 14, 2019
Filing Date:
May 09, 2018
Export Citation:
Assignee:
PINPOINT PHOTONICS INC
International Classes:
G01B11/24; G01N21/17
Attorney, Agent or Firm:
Koichiro Kijima