Title:
OPTICAL MEASURING APPARATUS
Document Type and Number:
Japanese Patent JPH02254305
Kind Code:
A
Abstract:
PURPOSE:To expand the range of materials to be measured which can undergo polar coordinate measurement and rectangular coordinate measurement by providing a constitution wherein a holding stage is moved up and down by lifting and lowering a turning stage, and the holding stage can be moved between a measuring position and a retreating position. CONSTITUTION:A turning stage 10 is provided with the following parts: a supporting plate 65 to which an air spindle 9 is fixed; a supporting post 66 which guides and supports the supporting plate 65 so that the plate can be lifted and lowered; and a turning base board 67 on which the supporting post 66 is uprightly provided. The base board 67 is pivoted with a pivot pin 68 so that the board can be turned. On the base board 67, the following parts are arranged: a feed screw 69 which is screwed into a female screw that is provided in the supporting plate 65; and a motor 70 which rotates the screw 69. When the shape of a larger material to be measured 1 is measured, the motor 70 is driven so as to lower the upper end part of the spindle 9 to a position lower than the lower end part of an upper stone surface plate 4. The turning stage 10 is turned with the pin 68 as the center. In this way, the holding stage 5 is moved from the measuring position beneath a Z-movement part 7 to a retreated position, and the lower space of the moving part 7 can be expanded.
Inventors:
YOSHIZUMI KEIICHI
Application Number:
JP7759289A
Publication Date:
October 15, 1990
Filing Date:
March 28, 1989
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01B11/24; G12B9/08; (IPC1-7): G01B11/24; G12B9/08
Domestic Patent References:
| JPS6426105A | 1989-01-27 |
Attorney, Agent or Firm:
Akira Kobiji (2 outside)
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