Title:
光学的測定装置及び測定方法
Document Type and Number:
Japanese Patent JP7426123
Kind Code:
B2
Abstract:
An optical measurement device includes at least a multi-frequency laser configured to simultaneously generate a frequency-fixed carrier and at least one frequency-modulated subcarrier, an optical branching element, a dual frequency beat signal generator, a difference signal generator, and an arithmetic processing unit. Either the carrier or the subcarrier within the output light of the multi-frequency laser is used as first measurement light and either the carrier or the subcarrier having a frequency different from that of the first measurement light is used as second measurement light. The dual frequency beat signal generator separates and outputs a first complex beat signal derived from the first measurement light and a second complex beat signal derived from the second measurement light. The difference signal generator outputs a difference signal between the first complex beat signal and the second complex beat signal.
Inventors:
Hidemi Tsuchida
Application Number:
JP2021566871A
Publication Date:
February 01, 2024
Filing Date:
October 29, 2020
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
G01S17/32; G01S7/493; G01S17/58
Domestic Patent References:
| JP2014185956A | ||||
| JP2010203884A | ||||
| JP2019045200A | ||||
| JP2018520346A |
Foreign References:
| US20190293794 | ||||
| WO2018230474A1 |
Attorney, Agent or Firm:
Kazuzumi Nishizawa
Makiko Otsuki
Onami Kazunori
Makiko Otsuki
Onami Kazunori
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