Title:
OPTICAL MEASURING INSTRUMENT
Document Type and Number:
Japanese Patent JP3192461
Kind Code:
B2
Abstract:
PURPOSE: To highly accurately measure the surface shape of an object to be measured by performing measurement while the object is tilted by controlling a slide table and turntable so that the tangential angles of the object can get in a measurable angle extent and integrating twice the variation of the tangential angles after calculating the variation.
CONSTITUTION: The signals of the tangential angles θ1 and θ2 of an object 12 to be measured the position of which is measured 117 and A/D-converted 16 are inputted to a controller 15. Then the object 12 is moved in a measurable angle extent α by a measuring unit amount β by moving a slide table 14. When it is discriminated that the object 12 traverses the measurable angle extent, the tangential angle θ1 at the final measuring point in the measuring section is stored. Then, after the object 12 is titled by a prescribed amount α by turning a turntable 13, the tangential angle ρ at the final measuring point is found. Thereafter, whether or not θ1=γ holds at the position where the object 12 traverses is discriminated and, when θ1=γ holds, the data number N1 is incremented by '1' for measuring the next section. When N1<N (number of measuring times), the surface shape of the object 12 is obtained by integrating twice the variation Δθ of the tangential angle.
Inventors:
Satoshi Seino
Yasuo Niino
Taizo Toyama
Moral Kazuhiro
Yasuo Niino
Taizo Toyama
Moral Kazuhiro
Application Number:
JP3936592A
Publication Date:
July 30, 2001
Filing Date:
February 26, 1992
Export Citation:
Assignee:
Toyota Koki Co., Ltd.
Satoshi Seino
Satoshi Seino
International Classes:
G01B11/24; G01B11/30; (IPC1-7): G01B11/24
Domestic Patent References:
| JP1233307A | ||||
| JP60140314A | ||||
| JP63243708A |