Title:
OPTICAL MEMBER, LIGHT SOURCE DEVICE AND INSPECTING DEVICE
Document Type and Number:
Japanese Patent JP2009265383
Kind Code:
A
Abstract:
To provide an optical member, preventing a reflecting mirror of a light source device from being tarnished without requiring specific facility.
The optical member includes: a support part (a transparent glass 16a); a reflecting part 16b supported by the support part and reflecting light 14b having a desired wavelength (e.g. ultraviolet ray light to visible light ray); and a heat ray reflecting part 16c supported by the support part, reflecting at least light 14c having a wavelength other than the desired wavelength toward the reflecting part to heat the reflecting part.
Inventors:
INOUE TAKESHI
YAMADA MASAYUKI
YAMADA MASAYUKI
Application Number:
JP2008115375A
Publication Date:
November 12, 2009
Filing Date:
April 25, 2008
Export Citation:
Assignee:
NIKON CORP
International Classes:
G02B5/08; F21S2/00; F21V7/00; G02B5/10; H01L21/027; F21Y101/00
Attorney, Agent or Firm:
Keiji Osawa
Takayuki Suga
Naomasa Shiraishi
Takayuki Suga
Naomasa Shiraishi
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