Title:
OPTICAL MODULATION ELEMENT AND DISPLAY DEVICE
Document Type and Number:
Japanese Patent JPH04204518
Kind Code:
A
Abstract:
PURPOSE:To suppress the reduction of contrast by allowing a part (vicinity of interface) or all the parts to have each refractive index gradient for reducing the refractive index difference between two contiguous layers of thin films. CONSTITUTION:A transparent glass substrate 301 has a thickness of about 1mm, and a transparent electrode ITO 302 consists of an ITO film and has a thickness of about 1500Angstrom , and an insulating film 303 consists of a SiO2/TiO2 and has a thickness of about 1200Angstrom , and a ferroelectric liquid crystal layer 305 has a thickness of about 2mum. A polyimide film 306 for the orientation of the ferroelectric liquid crystal layer 305 has a thickness of about 200Angstrom . The ITO having a thickness of 1200Angstrom is formed on a glass substrate through the reactive ion plating method in the O2 environment under 3-4X10<-4> Torr. Then glow electric discharge is suspended, and SiO is formed by 1000Angstrom in the EB vapor deposition method in the H2 environment, which vapor-deposited surface is irradiated by 1mus by the pulse rubby laser in the O2 environment with an annealing power desity of 0.2J/cm<2>.
Inventors:
MARUYAMA TOMOKO
KANEKO SHUZO
MITSUTAKE HIDEAKI
FUJIWARA RYOJI
KANEKO SHUZO
MITSUTAKE HIDEAKI
FUJIWARA RYOJI
Application Number:
JP33013590A
Publication Date:
July 24, 1992
Filing Date:
November 30, 1990
Export Citation:
Assignee:
CANON KK
International Classes:
G02F1/1333; G02F1/1335; G02F1/1337; G02F1/1347; (IPC1-7): G02F1/1333; G02F1/1335; G02F1/1337; G02F1/1347
Attorney, Agent or Firm:
Tetsuya Ito (1 outside)