Title:
光学モジュール
Document Type and Number:
Japanese Patent JP6571535
Kind Code:
B2
Abstract:
The present invention relates to an optical module, in particular facet mirror, comprising an optical element and a supporting structure for supporting the optical element, wherein the supporting structure comprises a positioning device for actively setting a position and/or orientation of the optical element in at least one degree of freedom. The supporting structure comprises a selectively activatable contacting device having at least one contacting unit having a first contact section, wherein the first contact section, in an activated state of the contacting device, contacts a second contact section of the optical element in order to exert a contact force on the optical element, while the first contact section, in a deactivated state of the contacting device is removed from the second contact section.
Inventors:
Yang Horn
Benedict Nauf
Benedict Nauf
Application Number:
JP2015558494A
Publication Date:
September 04, 2019
Filing Date:
February 25, 2014
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G03F7/20; G02B7/185
Domestic Patent References:
| JP2005517291A | ||||
| JP2012506135A |
Foreign References:
| WO2012175116A1 | ||||
| WO2012013227A1 |
Attorney, Agent or Firm:
Kenji Sugimura
Groundwork Kenichi
Makoto Fukuo
Groundwork Kenichi
Makoto Fukuo