Title:
OPTICAL OBSERVATION DEVICE OF COORDINATES RETRIEVAL TYPE AND LASER MARKING METHOD
Document Type and Number:
Japanese Patent JP3041599
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve the positioning accuracy by FIB or SEM and alleviate a damage of a sample by setting a sample on a stage, moving it to a target position while performing observing with coordinates or optical image from the outside, and selecting a laser oscillation wavelength according to a characteristic of the sample in a laser optical system coaxially arranged with an optical observation system on both sides thereof.
SOLUTION: A sample 9 on a stage 6 is observed by a CCD 3 through an observation system of an optical image. The image of the surface of sample 9 taken by the CCD 3 is taken in a control system 8 in a realtime manner and displayed on a CRT 7. An operator controls the stage 6 by use of an operation screen in the system 8 to retrieve a target position. The application of laser of a laser optical source 1 is made in correspondence with an optical axis of the observation optical system, and thus marking of not more than 10 μ is put on the sample 9. The center of gravity of mark is obtained by image processing, and two centers thereof are turned into a line form and whether the center thereof is set off from the processing and observing position or not is determined from the observed image and it is used as the coordinates of target position.
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Inventors:
Ryoji Hagiwara
Application Number:
JP13186598A
Publication Date:
May 15, 2000
Filing Date:
May 14, 1998
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
G01N23/04; G01Q30/04; G01Q30/20; G21K7/00; H01J37/04; G02B21/00; H01J37/22; H01J37/28; H01J37/30; (IPC1-7): H01J37/04; G02B21/00; H01J37/22; H01J37/28; H01J37/30
Domestic Patent References:
| JP9283073A | ||||
| JP5755947U |
Attorney, Agent or Firm:
Keinosuke Hayashi