Title:
OPTICAL PHASE PLATE AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JPS5348754
Kind Code:
A
Abstract:
PURPOSE: In a phase plate in holography, etc., the noises of transmitted light are perfectly removed and relatively easy and accurate production is made possible by making use of the difference in the rate of etching between silicon oxide layers and polysilicon.
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Inventors:
KITAHIRO ISAMU
ISHIHARA TAKESHI
ISHIHARA TAKESHI
Application Number:
JP12417276A
Publication Date:
May 02, 1978
Filing Date:
October 15, 1976
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G02B5/02; G03H1/02; (IPC1-7): G02B5/02; G03H1/02
Domestic Patent References:
JPS4998645A | 1974-09-18 | |||
JPS52134745A | 1977-11-11 |