Title:
OPTICAL POSITION MEASURING MECHANISM
Document Type and Number:
Japanese Patent JP2023061894
Kind Code:
A
Abstract:
To provide an optical position measuring mechanism to sense a relative position of at least two scales which are movable relative to each other along two measurement directions even in different planes and disposed so as to cross each other.SOLUTION: Both scales each have at least one measuring graduation. The directions of longitudinal extent of the scales are each oriented parallel to a first or second measurement direction. At the first scale, an illumination beam is split into sub-beams. The sub-beams subsequently impinge on a second scale and are reflected back toward the first scale. The sub-beams strike the first scale again, and recombined, so that a signal beam subsequently propagates toward a detection unit, which makes it possible to generate scanning signals with respect to the relative movement of the scales along the first or second measurement direction. The measuring graduation of the scale is configured as a two-dimensional cross grating which has a filtering effect that suppresses disturbing relatively higher diffraction orders at the cross grating.SELECTED DRAWING: Figure 2
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Inventors:
THOMAS KAELBERER
Application Number:
JP2022152115A
Publication Date:
May 02, 2023
Filing Date:
September 26, 2022
Export Citation:
Assignee:
HEIDENHAIN GMBH DR JOHANNES
International Classes:
G01D5/347
Attorney, Agent or Firm:
Osamu Yamamoto
Toru Miyamae
Junichi Matsuo
Toru Miyamae
Junichi Matsuo
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