Title:
OPTICAL PROJECTION SYSTEM
Document Type and Number:
Japanese Patent JP3728301
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an optical projection system of a projection aligner that can utilize the light having a shorter wavelength than the ultraviolet rays with sufficient precision to adjust the magnification without deteriorating the focusing when adjusting the magnification with minimum distortion.
SOLUTION: This optical projection system 1 has a reflector 4 which has a first reflection surface 4a and a second reflection surface 4b to change the direction of the projection light, an incident convex lens 2 to refract and transmit the above projection light to the first reflecting surface of this reflector, an output convex lens 3 to output the above projection light reflected on the second reflection surface of the above reflector, a moving support 8 to support both convex lenses with a prescribed interval on the same axis and move them in parallel with the optical axis, and a reflection compensation optical system 7 to reflect the projection light reflected on the first reflection surface to the second reflection surface. Further, the above reflection compensation optical system has a concave surface reflection mirror 6 and a compensation optical system 5.
Inventors:
Lee Toku
Application Number:
JP2003155292A
Publication Date:
December 21, 2005
Filing Date:
May 30, 2003
Export Citation:
Assignee:
Oak Manufacturing Co., Ltd.
International Classes:
G02B17/08; G02B13/24; G02B27/00; G03F7/20; H01L21/027; (IPC1-7): G02B17/08; G02B13/24; H01L21/027
Domestic Patent References:
| JP11502941A | ||||
| JP11502942A | ||||
| JP11503529A |
Attorney, Agent or Firm:
Isono Dozo