Title:
OPTICAL READOUT TYPE RADIATION-DISPLACEMENT CONVERTING DEVICE AND ITS MANUFACTURE, RADIATION DETECTING METHOD AND DEVICE, AND IMAGING METHOD AND DEVICE USING THE SAME
Document Type and Number:
Japanese Patent JP10253447
Kind Code:
A
Abstract:
To enhance the accuracy and sensitivity for detecting radiation without using a cooler.
A part 3 to be supported is supported on a base 1 via a leg part 2. The part 3 to be supported has an infrared absorbing film 4 receiving infrared radiation and converting it into heat and displacement parts 4, 5 which are displaced relative to the base 1 by the principle of bimetal according to the heat generated by the infrared absorbing film 4. A reflecting film 5 receives readout light (j), imparts changes in reflecting direction and position to the received readout light according to the displacement of the displacement parts 4, 5, and emits the reflected readout light that has undergone the changes.
Inventors:
Ishizuya, Toru
Amamiya, Noboru
Akagawa, Keiichi
Amamiya, Noboru
Akagawa, Keiichi
Application Number:
JP1997000256042
Publication Date:
September 25, 1998
Filing Date:
September 04, 1997
Export Citation:
Assignee:
NIKON CORP
International Classes:
G01K5/48; G01J1/02; G01J5/40; G01K5/00; G01J1/02; G01J5/00; (IPC1-7): G01J1/02; G01J5/40; G01K5/48