To provide an optical switch which is finely manufactured by using an MEMS (Micro Electro Mechanical System) technique and which has reliable and accelerated switching operation, better operation efficiency, and reduced power consumption and magnetic flux leakage.
A first V-groove 12 for fixing optical fibers and a recessed part 23a of a leaf spring positioning means 23 are simultaneously formed by etching on a lower substrate 11. A movable optical fiber 16 and a stationary optical fiber 26 are positioned and fixed in the first V-groove 12 and the leaf spring 13 is positioned and fixed into the recessed part 23a. Positioning rollers 15 are installed in recessed parts 11a of the lower substrate 11 and recessed parts 21a of the upper substrate 21. Both substrates 11 and 21 are aligned and fixed to each other. Another stationary optical fiber 26 is kept fixed into a second V-groove 22 of the upper substrate 21. Part of an electromagnet 18 is thereafter positioned by fitting and fixed into an electromagnet positioning recessed part 25 formed by etching on the top surface of the upper substrate 21.
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| WO/2011/096453 | ILLUMINATION OPTICAL DEVICE, ILLUMINATION METHOD, AND EXPOSURE METHOD AND DEVICE |
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KATO KENJI
Katsuhiro Ito
Ishibashi Masayuki
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