Title:
OPTICAL SYSTEM EVALUATING METHOD, PROCESS PLAN CREATING METHOD, FIGURE EVALUATING METHOD, AND METHOD FOR MANUFACTURING OPTICAL ELEMENT AND COMPUTER PROGRAM
Document Type and Number:
Japanese Patent JP2009250848
Kind Code:
A
Abstract:
To provide a method for accurately evaluating an optical performance of an optical system, and a related technology.
The optical system evaluating method for evaluating the optical performance of the optical system includes: a disposing process for disposing a plurality of circular regions within a to-be-evaluated region of an optical element included in the optical system; a fitting step of fitting a polynomial to figure data indicating a figure of the optical element in a plurality of the circular regions; and a calculating step of calculating the optical performance of the optical system based on a fitting result in the fitting step of a plurality of the circular regions.
Inventors:
KOIZUMI RYO
Application Number:
JP2008100864A
Publication Date:
October 29, 2009
Filing Date:
April 08, 2008
Export Citation:
Assignee:
CANON KK
International Classes:
G01M11/02; G01B21/20; G02B3/00; H01L21/027
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu