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Patent Searching and Data


Title:
OPTICAL SYSTEM, INSPECTION SYSTEM AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2011242768
Kind Code:
A
Abstract:

To provide an inspection system and a method with the use of a wide-angle optical system.

An optical system includes a wide-angle input lens group and an output lens group. The wide-angle input lens group receives wide-angle emission having an angle spread of, for example, more than 60 degrees from an object surface and generates emission capable of forming an image. The wide-angle input lens group prevents an intermediate focusing image from being formed within the wide-angle input lens group or thereafter. The output lens group receives emission capable of forming an image from the wide-angle input lens group and forms an image of at least a part of the object surface by focusing the emission capable of forming an image onto an image surface. A detector receives the image of at least a part of the object surface and detects, for example, a stain on the object surface on the basis of the received image.


Inventors:
Rico, Schuster
Yuli, Vladimirsky
James, Walsh H.
Application Number:
JP2011000103542
Publication Date:
December 01, 2011
Filing Date:
May 06, 2011
Export Citation:
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Assignee:
ASML HOLDING NV
International Classes:
G02B13/00