PURPOSE: To enable to perform a measurement of high temperature and to facilitate manufacture, by a method wherein a semiconductor film is formed on a tip surface of an optical fiber, and the tip of the optical fiber serves as a temperature-sensitive part.
CONSTITUTION: One end of an optical fiber 47, whose material is glass or quartz glass, is ground, and a semiconductor film 48 comprising Ga-As is vacuum-deposited 100μm in thickness on the ground surface. Au is further vacuum-deposited to form a reflecting film 49. The other end of the optical fiber 47 is ground, an emitting beam of a GaAs(Si) LED41 is guided to lenses 44 and 45 to bring it to enter. A beam splitter 46 is located between the lenses 44 and 45, and photo detectors 42 and 43 are situated at both sides thereof to measure a quantity of an incident light and a reflecting light. Provided an incident light quantity is IO, and a reflecting light quantity is IR, the IR is equal to IO×A×T(θ). If a transmission loss A in a midway of an optical path is constant, a formula of IR/IO∝T(θ) is established to obtain a value proportioning temperature θ, and if, afterwards, non-rectilineality is corrected, the temperature θ may be found.
SAWADA EMIKO
SONE MINORU
