Title:
OPTICAL TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP3553116
Kind Code:
B2
Abstract:
PURPOSE: To make laser. beam advance on many numbers of reflecting while suppressing interference and scattering of laser beam by making a reflection mirror to a concave reflection mirror having slit part for laser beam introducing in part of reflecting film.
CONSTITUTION: A hole 101 for introducing is pierced in a reflection mirror 1 placed facing to a mask 2, a laser beam 3 is introduced therefrom. An opening part 2a, in which the beam having the pattern corresponding to a shape to be worked on the mask 2 passes through, is arranged, the part masking beam is made to a reflecting film 2b of high reflectivity. A reflection mirror 1 arranged facing to the mask 2 is a concave mirror, the laser beam to be multiply reflected is trapped in between the mask 2 and reflection mirror 1. By this method, a number of multiply reflecting of the laser beam 3 entered as spot is sufficiently secured, a light strength is made to enough. The laser beam 3 is not reflected in incident direction but emits in the direction other than the incident direction, the damage to an optical part due to scattering of return beam to optical path surrounding and generation of dust are avoided.
Inventors:
Nobuyuki Head
Toshinori Yagi
Masao Izumo
Keiko Ito
Toshinori Yagi
Masao Izumo
Keiko Ito
Application Number:
JP2858294A
Publication Date:
August 11, 2004
Filing Date:
February 25, 1994
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G02B5/00; B23K26/064; B23K26/066; B23K26/142; B23K26/382; G02B5/10; G02B7/18; G02B7/192; G02B27/00; H05K3/00; B23K101/42; (IPC1-7): B23K26/06; G02B5/00; G02B5/10; G02B27/00
Domestic Patent References:
| JP3210987A | ||||
| JP5197157A | ||||
| JP2076683U | ||||
| JP5212572A | ||||
| JP4279293A | ||||
| JP5277776A | ||||
| JP1161309A |
Attorney, Agent or Firm:
Hiroaki Tazawa
Konobu Kato
Konobu Kato