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Title:
OPTICAL VIBRATOR SENSOR
Document Type and Number:
Japanese Patent JPH08145831
Kind Code:
A
Abstract:

PURPOSE: To obtain an optical vibrator sensor by which a temperature, a pressure and the like can be measured with high accuracy without being affected by a noise.

CONSTITUTION: A vibrator 1 which is composed of a cantilever 41 and of a both-ends-fixed beam 42 and a signal processing part 3 are connected by an optical fiber 2. The optical fiber 2 is formed in such a way that an optical fiber 21 for interference measurement is arranged in the central part and that an optical fiber 22 for optical-pulse supply is arranged and installed in its circumference on the same axis. Optical pulses are sent to the vibrator 1 via the optical fiber 22 from a laser diode 32 inside the signal processing part 3, and the vibrator 1 is vibrated by an optical and thermal action. In addition, a laser beam for interference measurement is sent to the vibrator 1 via the optical fiber 21 from a laser diode 31, the number of vibrations of the vibrator 1 is measured by using interference light obtained by its reflected light, and a pressure is computed.


Inventors:
SANO YASUKAZU
TSUJI NOBUHIKO
Application Number:
JP1994000305539
Publication Date:
June 07, 1996
Filing Date:
November 15, 1994
Export Citation:
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Assignee:
FUJI ELECTRIC CO LTD
International Classes:
G01L9/00; G01H9/00; G02B6/00; G02B6/04; (IPC1-7): G01L9/00; G01H9/00; G02B6/00; G02B6/04
Attorney, Agent or Firm:
森田 雄一



 
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