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Title:
OPTICAL WINDOW FOR PLASMA DISTRIBUTION MONITOR
Document Type and Number:
Japanese Patent JPS58131543
Kind Code:
A
Abstract:

PURPOSE: To prevent mingling of scattering light with laser exciting fluorescence, by providing a pair of an introducing window and drawout window of a laser beam parallel to each other and a fluorescence takeout window being situated at right angles to said windows at a projecting part of an apparatus.

CONSTITUTION: An optical window for introducing a laser beam 3 and an optical window for drawing out the laser beam 3' are provided in parallel with an opposite position to an apparatus main body 1 and an optical window for laser beam exciting fluorescence takeout 3" is provided in parallel with a light passage of the laser beam. In case that a laser beam 4 is worst, laser scattering light 6, 6' are not emanated directly from the window 3" even when the beam 4 is made incident vertically to the end of the window 3 because the length of projecting parts 2, 2', 2" attaching the windows 3, 3', 3" is made larger than its diameter. Interfering scattering light is not mingled with a laser exciting fluorescence 5 because reflection on the wall face is prevented also by carrying out blackening treatment of the inner part of the apparatus.


Inventors:
OSADA HISAJIROU
HIRATSUKA YUTAKA
Application Number:
JP1327182A
Publication Date:
August 05, 1983
Filing Date:
February 01, 1982
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
G01N21/64; (IPC1-7): G01N21/64
Attorney, Agent or Firm:
Toshiyuki Usuda



 
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