Title:
検査関連アルゴリズムのセットアップに用いられる訓練集合の最適化
Document Type and Number:
Japanese Patent JP6833027
Kind Code:
B2
Abstract:
Methods and systems for training an inspection-related algorithm are provided. One system includes one or more computer subsystems configured for performing an initial training of an inspection-related algorithm with a labeled set of defects thereby generating an initial version of the inspection-related algorithm and applying the initial version of the inspection-related algorithm to an unlabeledset of defects. The computer subsystem(s) are also configured for altering the labeled set of defects based on results of the applying. The computer subsystem(s) may then iteratively re-train the inspection-related algorithm and alter the labeled set of defects until one or more differences between results produced by a most recent version and a previous version of the algorithm meet one or morecriteria. When the one or more differences meet the one or more criteria, the most recent version of the inspection-related algorithm is outputted as the trained algorithm.
Inventors:
Purihal Martin
Soltan Mohammad Elfan
Paramashi Bam Sarabanan
Love Cyram
Jain Ankit
Shekizar Saras
Apparli Prasanti
Soltan Mohammad Elfan
Paramashi Bam Sarabanan
Love Cyram
Jain Ankit
Shekizar Saras
Apparli Prasanti
Application Number:
JP2019520517A
Publication Date:
February 24, 2021
Filing Date:
October 17, 2017
Export Citation:
Assignee:
KLA Corporation
International Classes:
H01L21/66; G01N21/956; G01N23/2251; G06T7/00
Domestic Patent References:
| JP2013224943A | ||||
| JP2008082821A |
Foreign References:
| US20150262038 |
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office