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Patent Searching and Data


Title:
ORGANIC ANTI-REFLECTIVE FILM COMPOSITION AND METHOD FOR PREPARING THE SAME
Document Type and Number:
Japanese Patent JP2003183329
Kind Code:
A
Abstract:

To provide an anti-reflective organic substance which prevents the back reflection from lower film layers and eliminates standing waves that occur by changes in the thickness of photoresist and by light during a process for forming ultrafine patterns that use photoresist for lithography using 193 nm ArF, to provide an anti-reflective organic compound that can be used, especially, in the formation of the ultrafine patterns of 64M, 256M, 1G, and 4G DRAMs and a method for preparing the same, and to provide an anti-reflective film composition containing such anti-reflective organic compound, an anti- reflective film using the same, and a method for preparing the film.

There is provided a polymer compound having a structure of chemical formula (1) (wherein Ra and Rb are each hydrogen or methyl; R' and R" are each -H, -OH, -OCOCH3, -COOH, -CH2OH, or a 1-5C substituted or unsubstituted linear or branched alkyl or alkoxyalkyl; n is an integer of 1-5; and x and y are each a molar ratio of 0.01-0.99).


Inventors:
JUNG MIN-HO
CHOI JOONG-IL
Application Number:
JP2002308186A
Publication Date:
July 03, 2003
Filing Date:
October 23, 2002
Export Citation:
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Assignee:
HYNIX SEMICONDUCTOR INC
International Classes:
C08L25/18; C08F2/04; C08F212/14; C08F220/28; C08L29/10; C08L33/14; C09D5/00; C09D123/02; C09D125/14; C09D133/06; G02B1/10; G02B1/111; G03C1/76; G03F7/11; H01L21/312; (IPC1-7): C08F212/14; C08F2/04; C08F220/28; C08L25/18; C08L29/10; C08L33/14; C09D5/00; C09D123/02; C09D125/14; C09D133/06; H01L21/312
Attorney, Agent or Firm:
Kenji Yoshida (1 person outside)