Title:
有機膜組成物、有機膜、およびパターン形成方法
Document Type and Number:
Japanese Patent JP6954723
Kind Code:
B2
Abstract:
A method of measuring the thermal shrinkage ratio is described in the detailed description.
Inventors:
Kim Min Hide
南 ▲えん▼ 希
White
Song Gen Knowledge
Youn Byul
Chung Sulgi
Nozomi Hong
Yellow good people
南 ▲えん▼ 希
White
Song Gen Knowledge
Youn Byul
Chung Sulgi
Nozomi Hong
Yellow good people
Application Number:
JP2016050162A
Publication Date:
October 27, 2021
Filing Date:
March 14, 2016
Export Citation:
Assignee:
SAMSUNG SDI Co., LTD.
International Classes:
G03F7/11; C08K5/05; C08K5/13; C08L61/08; C09D161/08; G03F7/26; H01L21/027
Domestic Patent References:
| JP2010524224A | ||||
| JP2010529499A | ||||
| JP2015515112A | ||||
| JP2017014191A | ||||
| JP2016151024A |
Foreign References:
| US20120153511 | ||||
| US20140183701 | ||||
| US20120168894 |
Attorney, Agent or Firm:
Hatta International Patent Corporation