Title:
ORGANIC FILM FORMATION APPARATUS
Document Type and Number:
Japanese Patent JP2023113209
Kind Code:
A
Abstract:
To provide an organic film formation apparatus in which a heater can be easily attached to/detached from a chamber.SOLUTION: An organic film formation apparatus according to an embodiment can heat a workpiece having a substrate and a liquid solution including an organic material applied to an upper surface of the substrate and a solvent in an ambience decompressed relative to an atmospheric pressure. The organic film formation apparatus comprises: a chamber which can maintain the ambience decompressed relative to an atmospheric pressure; a first exhaust part which can exhaust the air in the chamber; a guide part which is opposed to the substrate, has a cylindrical shape, has a shape extending in one direction, and in which ends open on both sides are provided in the chamber; a support part which is provided in the guide part and has a first hole penetrating in an axial direction; and a heater which is provided detachably in the first hole and has a heating part extending along the guide part.SELECTED DRAWING: Figure 2
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Inventors:
KUROSAWA MASAHIKO
Application Number:
JP2022015393A
Publication Date:
August 16, 2023
Filing Date:
February 03, 2022
Export Citation:
Assignee:
SHIBAURA MECHATRONICS CORP
International Classes:
B05C9/14; B05C11/10; B05C15/00; F26B9/06; F26B23/04; H05B33/02; H10K50/10
Attorney, Agent or Firm:
Masahiko Hyugaji
Junichi Kozaki
Hiroshi Ichikawa
Junichi Kozaki
Hiroshi Ichikawa
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