Title:
有機膜形成装置、および有機膜の製造方法
Document Type and Number:
Japanese Patent JP7429490
Kind Code:
B2
Abstract:
An objective of the present invention is to provide an organic film forming device capable of reducing the cost of cooling the work on which an organic film is formed, and maintaining the quality of the organic film, and a method of manufacturing the organic film. The organic film forming device includes: a chamber capable of maintaining an atmosphere reduced in pressure from atmospheric pressure; an exhaust unit capable of exhausting the inside of the chamber; a treatment area in which the work having a substrate and a solution containing an organic material and a solvent applied to the upper surface of the substrate is supported; a heating unit installed to face the work supported in a processing area; a cooling unit supplying the cooling gas to the heating unit; and a controller controlling the heating unit, the exhaust unit, and the cooling unit.
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Inventors:
Takashi Takahashi
Akinori Iso
Akinori Iso
Application Number:
JP2022109584A
Publication Date:
February 08, 2024
Filing Date:
July 07, 2022
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
F26B25/00; B05C9/14; B05C11/00; B05D3/00; B05D3/02; F26B5/04
Domestic Patent References:
| JP2019205991A | ||||
| JP2019184230A | ||||
| JP2019184229A | ||||
| JP2015092538A | ||||
| JP2004502535A | ||||
| JP2011056360A | ||||
| JP2004317432A | ||||
| JP2003124102A | ||||
| JP2003124283A | ||||
| JP2008141176A |
Foreign References:
| WO2019117250A1 | ||||
| WO2011078309A1 | ||||
| CN110249409A |
Attorney, Agent or Firm:
Masahiko Hyugaji
Junichi Kozaki
Hiroshi Ichikawa
Junichi Kozaki
Hiroshi Ichikawa