ORGANIC MATERIAL REMOVING DEVICE FOR SUBSTRATE

Japanese Patent JPS61194830

A

PURPOSE:To rapidly and uniformly decompose and remove an organic material and a resist on a substrate by providing an ultraviolet ray lamp and an ozone spray tube in parallel above a hot plate so that the hole of the tube is directed toward both sides at the prescribed angle with respect to direct downward direction. CONSTITUTION:After a substrate 20 is conveyed by a conveyor belt 9 to the center of a hot plate 2, the belt 9 is moved down, the substrate 20 is placed on the plate 2, and intaken by an intaking hole 4. Ultraviolet ray having 254nm of wavelength is emitted by an ultraviolet ray lamp 23 to a resist on the surface while uniformly heating the substrate 20 by the plate 2 at the prescribed temperature, ozone generated by an ozonizer 27 is uniformly blown from a slit 24 to the surface of the substrate 20 while laterally reciprocating an injection tube 22. The resist of the substrate 20 is gradually decomposed from the surface by active oxygen produced by decomposing by the ultraviolet rays and the ozone, and resist decomposing product is oxidized and removed.

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HAYASHI TOKUYUKI
KITAGAWA MASARU

JP3450585A

August 29, 1986

February 25, 1985

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H01L21/304; G03F7/30; G03F7/36; H01L21/027; H01L21/30; (IPC1-7): G03F7/00

JPS5220766A	1977-02-16
JPS58206128A	1983-12-01
JPS5339228A	1978-04-11
JPS5815939A	1983-01-29
JPS5925223A	1984-02-09
JPS59193030A	1984-11-01

Soichi Takezawa

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