Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ORGANIC MATERIAL FOR SEMICONDUCTOR INTERLAYER INSULATION FILM
Document Type and Number:
Japanese Patent JP2000031137
Kind Code:
A
Abstract:

To produce an organic material for semiconductor interlayer insulation film, and a semiconductor interlayer insulation film, in which dielectric constant is lowered to a desired level by employing an organic material foamed by adding a foaming agent for forming the semiconductor interlayer insulation film.

The organic material for forming a semiconductor interlayer insulation film is produced by adding a foaming agent and forming the organic material. The foaming agent is an azobis compound represented by a formula (X)3CN=NC(Y)3. In the formula, X and Y represents, independently, any one kind selected from a group of hydrogen atom, alkyl group, alkenyl group, cyano group phenyl group, amino group, nitro group, sulfuryl group, halogen and derivatives thereof. Three X and Y groups are not required to be same group. Two or three X and Y groups may be bonded at the ends into cyclic or polycyclic structure. According to the structure, dielectric constant of organic material film can be lowered furthermore.


Inventors:
MATSUZAWA NOBUYUKI
Application Number:
JP20152598A
Publication Date:
January 28, 2000
Filing Date:
July 16, 1998
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SONY CORP
International Classes:
C09D5/00; C09D7/12; H01L21/312; (IPC1-7): H01L21/312