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Title:
ORGANIC SILOXANE COMPOUND
Document Type and Number:
Japanese Patent JP2009179640
Kind Code:
A
Abstract:

To provide new organosiloxane compounds suitable for low dielectric constant materials, particularly PECVD apparatuses.

The new organosiloxane compounds include 1,3,5-triisopropyl-1,3,5-trivinyl cyclotrisiloxane, 1,3,5-triisopropyl-1,3,5-trimethyl cyclotrisiloxane, 1,3,5,7-tetraisopropyl-1,3,5,7-tetravinyl cyclotetrasiloxane, 1,3,5,7,9-pentaisopropyl-1,3,5,7,9-pentavinyl cyclopentasiloxane and the like.


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JPS6024112[Title of the Invention] ORGANO cyclotetrasiloxane
WO/2012/091586FLUOROCARBOFUNCTIONAL SILSESQUIOXANES CONTAINING OTHER REACTIVE FUNCTIONAL GROUPS AND A METHOD TO OBTAIN THE SAME
Inventors:
HARA TAIJI
YOSHIDA KEISUKE
Application Number:
JP2009120571A
Publication Date:
August 13, 2009
Filing Date:
May 19, 2009
Export Citation:
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Assignee:
TOSOH CORP
International Classes:
C07F7/21; C07F7/18; C23C16/40; H01L21/312; H01L21/316; B05D7/24
Domestic Patent References:
JP2002016057A2002-01-18
JPH07149771A1995-06-13



 
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