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Title:
ORGANIC THIN FILM FORMING DEVICE
Document Type and Number:
Japanese Patent JPS63162059
Kind Code:
A
Abstract:

PURPOSE: To obtain hetero-structured film of good quality, by providing a partition part partitioning a 1st area where an ampliphilic organic monomolecular film is developed in a water tank from a 2nd area where a different monomolecular film is developed, moving a base plate up and down, and transferring the base plate between both areas.

CONSTITUTION: The 1st area A where a monomolecular film is developed and the 2nd area where a monomolecular film different from said monomolecular film or no monomolecular film is developed are provided in the water tank 1 for developing amphiphilic monomolecular films. And the area A and the area B are partitioned by the partition part 60 consisting of a revolving boss 61, a revolving holder 62, a partition plate 63, fixing metals 64, a pressurizing plate 65 and a sealing spring 66, etc. And, a base plate vertical drive means moving a base plate 20 up and down inoder to stick the monomolecular film to the base plate 20 and a base plate transfer means transferring the base plate 20 between the areas A and B are provided. As a result, a hetero-structure film of good quality is formed.


Inventors:
YASUDA SATOSHI
WAKAYAMA SHIGERU
MIURA AKIRA
Application Number:
JP30827586A
Publication Date:
July 05, 1988
Filing Date:
December 26, 1986
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
B01J19/00; B05C3/02; B05D1/20; H01L21/368; H01L51/05; H01L51/40; (IPC1-7): B01J19/00; B05C3/02; B05D1/20; H01L21/368; H01L29/28
Attorney, Agent or Firm:
Noriyuki Noriyuki



 
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