Title:
振動ミラー素子
Document Type and Number:
Japanese Patent JP5471946
Kind Code:
B2
Abstract:
This vibrating mirror element (100) includes a mirror portion (10) swingable on a first axis (400), a driving portion (40, 50), including a free end (S1) and a fixed end (S2), for swinging the mirror portion by deformation and a shaft portion (30, 31) provided between the mirror portion and the driving portion to extend along the first axis. The free end of the driving portion is connected to the shaft portion, while the fixed end of the driving portion is fixed on a side of the driving portion closer to the mirror portion and in the vicinity of the shaft portion.
Inventors:
Murayama Manabu
Naoki Inoue
Naoki Inoue
Application Number:
JP2010173265A
Publication Date:
April 16, 2014
Filing Date:
August 02, 2010
Export Citation:
Assignee:
Funai Electric Co., Ltd.
International Classes:
G02B26/10; B81B3/00; G02B26/08
Domestic Patent References:
| JP2008193890A | ||||
| JP2011232589A | ||||
| JP2009192967A | ||||
| JP2006309152A |
Attorney, Agent or Firm:
Hirokazu Miyazono