To provide an oscillation gyroscopic sensor element having a small-sized, highly-sensitive and cantilever-shaped oscillator.
The cantilever-shaped oscillator 11 having a lower electrode, a piezoelectric thin film and an upper electrode formed on a monocrystal silicon substrate by a thin film forming process has a driving electrode 6a formed as the upper electrode in the longitudinal direction of the oscillator 11 to which a voltage for oscillating the oscillator 11 is applied, and the first detection electrode 6b and the second detection electrode 6c formed in the longitudinal direction of the oscillator 11 in parallel out of contact with the driving electrode 6a in the form sandwiching the driving electrode 6a. Assuming that the width of the driving electrode 6a is W0, the width of the first detection electrode 6b is W1, the width of the second detection electrode 6c is W3, and W=W0+W1+W2, the condition 0.5<(W0/W)<1 is satisfied.
TAMURA TAKASHI
HONDA JUNICHI
INAGUMA TERUYUKI
Eiichi Tamura
Seiji Iga