Title:
OUTPUT CURRENT-CONTROL DEVICE, STAGE DEVICE, PROJECTION ALIGNER, AND DEVICE MANUFACTURED BY THE PROJECTION ALIGNER AND MANUFACTURING METHOD THER DEVICE
Document Type and Number:
Japanese Patent JP2001128488
Kind Code:
A
Abstract:
To provide an output current-control device, where a linear amplifier and a PWM amplifier are efficiently combined, and a stage device and a projection aligner using the output current-control device.
According to an output current, a linear amplifier 105 and a PWM amplifier 104 are used separately, and output current detectors R5 and 107 are used in common with a comparator 106.
Inventors:
MOTOTSUGU RYUZO
Application Number:
JP30997999A
Publication Date:
May 11, 2001
Filing Date:
October 29, 1999
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F7/22; G05D3/12; H01L21/027; H01L21/68; H02P7/00; H02P25/06; (IPC1-7): H02P7/00; G05D3/12; H01L21/027
Attorney, Agent or Firm:
Fuyuki Nagai