Title:
OUTPUT CURRENT-CONTROL DEVICE, VIBRATION-ISOLATING DEVICE, PROJECTION ALIGNER, AND DEVICE MANUFACTURED BY THE PROJECTION ALIGNER AND MANUFACTURING METHOD OF THE DEVICE
Document Type and Number:
Japanese Patent JP2001128489
Kind Code:
A
Abstract:
To provide an output current-control device having a plurality of channels (current amplifiers) that are not affected by a beat signal, and an accurate vibration-isolation device and a projection aligner using the output current-control device.
This output current-control device has a plurality of sets (221-224) of current amplifiers 202-208 for controlling an output current, based on input signals V1-V4. Each of the current amplifiers 202-208 adopts a PWM system by pulse width modulation control, and a triangular wave signal used for the pulse width modulation of each of the current amplifiers 202-208 is generated by a single triangular wave signal generation circuit 220.
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Inventors:
NAGASAWA MASAYA
Application Number:
JP30998099A
Publication Date:
May 11, 2001
Filing Date:
October 29, 1999
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; H02M3/28; H02M7/48; H02M7/493; H02P5/00; H02P7/00; H02P25/06; (IPC1-7): H02P7/00; H01L21/027; H02M3/28; H02M7/48
Attorney, Agent or Firm:
Fuyuki Nagai