Title:
重ね合わせ測定誤差補正方法
Document Type and Number:
Japanese Patent JP3609896
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To realize high precision of measurement value correction of superposition error independent of a TIS value by correcting a measurement value based on an average value of a TIS value when its dispersion is less than a reference value, by correcting it base on each TIS value when it exceeds a reference value and an extraordinary value exists and correcting it based on an average value except an extraordinary value when it exceeds a reference value and an extraordinary value does not exist. SOLUTION: When dispersion of a plurality of TIS values is less than a reference value, a measurement value of relative misregistration of each mark is corrected based on an average value of a TIS value. When dispersion of a pluralist of TIS values exceeds a reference value and a TIS value disperses largely with respect to 0, a measurement value of each relative misregistration of each mark is corrected based on each TIS value. When dispersion of a plurality of TIS values exceeds a reference value and the difference between any of a puerility of TIS values and other TIS values is large, a measurement value of relative misregistration of each of a puerility of marks is corrected based on an average value of TIS value except the TIS value of the large difference.
Inventors:
Tomimatsu Yoshikatsu
Application Number:
JP9395396A
Publication Date:
January 12, 2005
Filing Date:
April 16, 1996
Export Citation:
Assignee:
Renesas Technology Corp.
International Classes:
G01B11/00; G03F9/00; H01L21/027; (IPC1-7): H01L21/027; G01B11/00; G03F9/00
Domestic Patent References:
| JP5013307A | ||||
| JP6084751A | ||||
| JP6181155A | ||||
| JP9280816A | ||||
| JP6291021A | ||||
| JP7037770A | ||||
| JP7045495A | ||||
| JP7226370A |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai