Title:
OXIDE DIELECTRIC THIN FILM AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JPH07294861
Kind Code:
A
Abstract:
PURPOSE: To provide an oxide dielectric thin film which is good in control of its compsn. and orientability of crystals and can be treated at a lower temp. than heretofore by preventing loss of raw materials.
CONSTITUTION: This oxide dielectric thin film and process for producing the thin film include a stage for applying a precursor soln. on a substrate and a stage for heating the substrate in a plasma atmosphere contg. at least oxygen elements in the components.
Inventors:
IMAI TAKAHIRO
TANAKA MOTOYUKI
FUJIMORI NAOHARU
TANAKA MOTOYUKI
FUJIMORI NAOHARU
Application Number:
JP8295394A
Publication Date:
November 10, 1995
Filing Date:
April 21, 1994
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
G02F1/035; (IPC1-7): G02F1/035
Attorney, Agent or Firm:
Aoyama Ryo (1 person outside)
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