Title:
OXIDE SINTERED BODY AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2013177261
Kind Code:
A
Abstract:
To provide an oxide sintered body capable of stably forming with good reproducibility a zinc oxide-based transparent conductive film with a low resistance and an excellent conductivity.
An oxide sintered body substantially includes zinc, titanium and oxygen, and the atomic number ratio of titanium to the total of zinc and titanium Ti/(Zn+Ti) is over 0.02 and ≤0.1, and the origin of the titanium has a crystalline structure of TiO (II) single phase by X-ray diffraction.
Inventors:
NAKADA KUNIHIKO
HOTTA SHOHEI
FUJIYOSHI KUNITAKA
HOTTA SHOHEI
FUJIYOSHI KUNITAKA
Application Number:
JP2012041456A
Publication Date:
September 09, 2013
Filing Date:
February 28, 2012
Export Citation:
Assignee:
SUMITOMO CHEMICAL CO
FUKUOKA PREFECTURE
FUKUOKA PREFECTURE
International Classes:
C04B35/453; C23C14/08; C23C14/34; H01B5/14; H01B13/00
Attorney, Agent or Firm:
Toshikazu Fukai