Title:
OXIDE SUPERCONDUCTIVE FILM AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JP3195886
Kind Code:
B2
Abstract:
PURPOSE: To obtain an oxide superconductive film having high critical current density by successively forming a metallic layer, an amorphous ceramic layer, a crystalline ceramic layer and an oxide superconductor layer on a metallic substrate.
CONSTITUTION: A metallic layer 2, an amorphous ceramic layer 3, a crystalline ceramic layer 4 and an oxide superconductor layer 5 are successively formed on a metallic substrate 1 to obtain the objective oxide superconductive film. Since the crystalline ceramic layer 4 on the amorphous ceramic layer 3 spontaneously causes a-axis orientation by the presence of the layer 3 and the oxide superconductor layer 5 on the layer 4 causes c-axis orientation, this oxide superconducting film has high critical current density. When the layer 3 is smoothened after the layer 4 is formed on the layer 3, the crystallinity and orienting property of the layer 5 are improved and difference in level dividing the current path of the layer 5 is reduced to increase the critical current density of the oxide superconductive film.
Inventors:
Shigeru Matsuno
Toshio Umemura
Hideoki Uchikawa
Toshio Umemura
Hideoki Uchikawa
Application Number:
JP30215694A
Publication Date:
August 06, 2001
Filing Date:
December 06, 1994
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
C01G1/00; C01G3/00; C23C14/08; C23C16/40; C30B29/22; H01B12/06; H01B13/00; H01L39/22; (IPC1-7): C30B29/22
Domestic Patent References:
| JP6487763A | ||||
| JP6465299A | ||||
| JP2232381A | ||||
| JP1109613A | ||||
| JP2220810A | ||||
| JP1249626A | ||||
| JP3210711A | ||||
| JP1304613A |
Other References:
ＢＯＩＫＯＶ Ｙｕ．ｅｔ ａｌ．，”Ｇｒｏｗｔｈ ａｎｄ ｐｒｏｐｅｒｔｉｅｓ ｏｆ ａ ｍｕｌｔｉｌａｙｅｒ ｓｙｓｔｅｍ ｂａｓｅｄ ｏｎ Ｙ１Ｂａ２Ｃｕ３０ｘ ａｎｄ ａｍｏｒｐｈｏｕｓ Ｙ−Ｚｒ０２，”Ｊｏｕｒｎａｌ ｏｆ Ａｐｐｌｉｅｄ Ｐｈｙｓｉｃｓ，Ｖｏｌ．７２，Ｎｏ．１，１ Ｊｕｌ．１９９２，ｐｐ．１９９−２０２
ＦＵＫＵＴＯＭＩ Ｍ．ｅｔ ａｌ．，”Ｌａｓｅｒ ｄｅｐｏｓｉｔｉｏｎ ｏｆ ＹＢａ２Ｃｕ３０ｙ ｔｈｉｎ ｆｉｌｍｓ ｏｎ ａ ｍｅｔａｌｌｉｃ ｓｕｂｓｔｒａｔｅ ｗｏｔｈ ｂｉａｘｉａｌｌｙ ｔｅｘｔｕｒｅｄ ＹＳＺ ｂｕｆｆｅｒ ｌａｙｅｒｓ ｐｒｅｐａｒｅｄ ｂｙ ｍｏｄｉｆｉｅｄ ｂｉａｓ ｓｐｕｔｔｅｒｉｎｇ，”Ｐｈｙｓｉｃａ Ｃ，Ｖｏｌ．２１９，Ｎｏ．３＆４，１５ Ｊａｎ．１９９４，ｐｐ．３３３−３３９
ＲＥＡＤＥ Ｒ．Ｐ．ｅｔ ａｌ．，”Ｂｉａｘｉａｌｌｙ−ｔｅｘｔｕｒｅｄ ＹＢａ２Ｃｕ３０７−ｘ ｔｈｉｎ ｆｉｌｍ ｇｒｏｗｔｎ ｏｎ ｐｏｌｙｃｒｙｓｔａｌｌｉｎｅ ａｎｄ ａｍｏｒｐｈｏｕｓ ｓｕｂｓｔｒａｔｅｓ ｕｓｉｎｇ ｉｏｎ−ａｓｓｉｓｔｅｄ ｌａｓｅｒ ｄｅｐｏｓｉｔｉｏｎ ｏｆ ｙｔｔｒｉａ−ｓｔａｂｉｌｉｚｅｄ ｚｉｒｃｏｎｉａ ｉｎｔｅｒｍｅｄｉａｔｅ ｌａｙｅｒｓ，”Ｍａｔｅｒｉａｌｓ Ｒｅｓｅａｒｃｈ Ｓｏｃｉｅｔｙ Ｓｙｍｐｏｓｉｕｍ Ｐｒｏｃｅｅｄｉｎｇｓ，Ｖｏｌ．２８５，１９９３，ｐｐ．２８１−２８６
ＦＵＫＵＴＯＭＩ Ｍ．ｅｔ ａｌ．，”Ｌａｓｅｒ ｄｅｐｏｓｉｔｉｏｎ ｏｆ ＹＢａ２Ｃｕ３０ｙ ｔｈｉｎ ｆｉｌｍｓ ｏｎ ａ ｍｅｔａｌｌｉｃ ｓｕｂｓｔｒａｔｅ ｗｏｔｈ ｂｉａｘｉａｌｌｙ ｔｅｘｔｕｒｅｄ ＹＳＺ ｂｕｆｆｅｒ ｌａｙｅｒｓ ｐｒｅｐａｒｅｄ ｂｙ ｍｏｄｉｆｉｅｄ ｂｉａｓ ｓｐｕｔｔｅｒｉｎｇ，”Ｐｈｙｓｉｃａ Ｃ，Ｖｏｌ．２１９，Ｎｏ．３＆４，１５ Ｊａｎ．１９９４，ｐｐ．３３３−３３９
ＲＥＡＤＥ Ｒ．Ｐ．ｅｔ ａｌ．，”Ｂｉａｘｉａｌｌｙ−ｔｅｘｔｕｒｅｄ ＹＢａ２Ｃｕ３０７−ｘ ｔｈｉｎ ｆｉｌｍ ｇｒｏｗｔｎ ｏｎ ｐｏｌｙｃｒｙｓｔａｌｌｉｎｅ ａｎｄ ａｍｏｒｐｈｏｕｓ ｓｕｂｓｔｒａｔｅｓ ｕｓｉｎｇ ｉｏｎ−ａｓｓｉｓｔｅｄ ｌａｓｅｒ ｄｅｐｏｓｉｔｉｏｎ ｏｆ ｙｔｔｒｉａ−ｓｔａｂｉｌｉｚｅｄ ｚｉｒｃｏｎｉａ ｉｎｔｅｒｍｅｄｉａｔｅ ｌａｙｅｒｓ，”Ｍａｔｅｒｉａｌｓ Ｒｅｓｅａｒｃｈ Ｓｏｃｉｅｔｙ Ｓｙｍｐｏｓｉｕｍ Ｐｒｏｃｅｅｄｉｎｇｓ，Ｖｏｌ．２８５，１９９３，ｐｐ．２８１−２８６
Attorney, Agent or Firm:
Soga Doteru (6 people outside)