To provide an oxide superconductive film having a higher superconducting transition temperature Tc than a conventional oxide superconductive film.
In the oxide superconductive film manufacturing method, a liquid solution of an organic metal compound is used to manufacture an oxide superconductive film on a metal substrate by metal organic deposition (MOD) method. The method comprises: a coating film preparation step which includes coating a metal substrate with an organic metal compound liquid solution to prepare a coating film; a preliminary baking heat treatment step which includes heating the coating film to thermally decompose the organic metal compound and remove organic constituents, whereby forming a precursor film of the oxide superconductive film; and a primary baking heat treatment step which includes heating and crystallizing the precursor film to form the oxide superconductive film. In the preliminary baking heat treatment step, the coating film is heated under an atmosphere whose oxygen content proportion is 80-100 vol%.
NAGAISHI TATSUOKI
HONDA GENKI
OKI YASUTARO
HANAFUSA KEI
| JP2007165153A | 2007-06-28 | |||
| JP2010049891A | 2010-03-04 |
Naomi Kamino
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