Title:
OXYGEN SENSOR
Document Type and Number:
Japanese Patent JP2553980
Kind Code:
B2
Abstract:
PURPOSE: To obtain an oxygen sensor with a small power consumption without using a porous substrate.
CONSTITUTION: In an electrical insulator thin film 15 which is formed on a substrate 10, a thin-film heater 14 is formed at a part 15a which is positioned on a hole 27 provided on the substrate. A thin film 22 of zirconia solid electrolyte which is sandwiched by electrodes 21 and 23 is adhered and formed on the thin-film heater. Then, a through hole 28 which communicates with the hole of the substrate is provided at the thin-film heater and the electrical insulator thin film so that one of these electrodes 21 is exposed to a specimen gas. Then, for obtaining critical current characteristics, a hole in the substrate is blocked by the electrical insulator thin film 15 in the upper side and by a blocking member 29 in the lower side, respectively, and then a small hole 30 for diffusion the sample gas is provided at either of the electrical insulator thin film or the blocking member.
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Inventors:
KIMURA MITSUTERU
Application Number:
JP34971591A
Publication Date:
November 13, 1996
Filing Date:
December 07, 1991
Export Citation:
Assignee:
KIMURA MITSUTERU
RIKOO SEIKI KK
RIKOO SEIKI KK
International Classes:
G01N27/41; (IPC1-7): G01N27/41
Domestic Patent References:
| JP59166854A | ||||
| JP61147154A | ||||
| JP63259459A | ||||
| JP4919838B1 |
Attorney, Agent or Firm:
Yoshiaki Satake