PURPOSE: To increase the response speed with the concn. change in an oxygen sensor for which single crystal lanthanum fluoride is used by forming a platinum electrode consisting of a thin film formed by sputtering as an electrode for a sensing part.
CONSTITUTION: The single crystal lanthanum fluoride 2 is formed as a solid electrolyte and a reference electrode part 3 of an inorg. solid consisting of a thin fluoride + metallic tin layer is provided on one side thereof. The surface is masked by an epoxy resin 31 so as not to be affected by the gaseous oxygen in the atm. air. The platinum electrode 4 consisting of the thin film formed by sputtering is provided on the sensing surface of the other surface by which the response speed with the concn. change is increased and the linearity between the logarithm of the oxygen concn. and the generated voltage is satisfactorily maintained.
TAWARA OSAMU
MIZUGUCHI HIROYOSHI
SHINADA MEGUMI
| JPS5794642A | 1982-06-12 |