Title:
OZONE GENERATING UNIT, OZONE GENERATING DEVICE AND OZONE TREATING SYSTEM
Document Type and Number:
Japanese Patent JP2001026405
Kind Code:
A
Abstract:
To hold an electrode substrate and a gas guide in an ozone generating unit without damaging them.
The ozone generating unit 50 is provided with the electrode substrate 3 having a dielectric 2 and a pair of electrodes 1a, 1b provided on the dielectric 2, the gas guide 5 provided on the electrode substrate 3 through a spacing chip 4 and a cooling body 7 in contact with the electrode substrate 3. A holding plate 20 is arranged through elastic bodies 19a, 19b on the surface of the gas guide 5 opposite to the electrode substrate 3. The cooling body 7 and the holding plate 20 are connected to each other with a bolt 21 on the outer periphery of the electrode substrate 3 and the gas guide 5.
Inventors:
ANDO SUEO
KAWAGUCHI SHIGERU
OGURA YASUHIRO
MURATA TAKAAKI
INABA MICHIHIKO
YAMANASHI ICHIRO
OKITA YUJI
KAWAGUCHI SHIGERU
OGURA YASUHIRO
MURATA TAKAAKI
INABA MICHIHIKO
YAMANASHI ICHIRO
OKITA YUJI
Application Number:
JP19803699A
Publication Date:
January 30, 2001
Filing Date:
July 12, 1999
Export Citation:
Assignee:
TOSHIBA F A SYSTEM ENG
TOSHIBA CORP
TOSHIBA CORP
International Classes:
C02F1/28; B01F1/00; C01B13/11; C02F1/50; C02F1/78; C02F9/00; H01T23/00; (IPC1-7): C01B13/11; B01F1/00; C02F1/28; C02F1/50; C02F1/78; C02F9/00; H01T23/00
Attorney, Agent or Firm:
Kazuo Sato (3 others)