OZONE SUPPLY LINE TO OZONE UTILIZATION SYSTEM AND METHOD FOR PASSIVATING THE SAME

Japanese Patent JP3250002

B2

PROBLEM TO BE SOLVED: To supply an ozone gas whose concentration is stabilized by constructing a supply pipe and equipment from stainless steel or aluminum that is subjected to passivation process to serve as the inner surface of a gas supply line.
SOLUTION: An ozone supply line is constructed by communicating an ozone gas supply source, such as an ozonizer or a gas cylinder holding ozone gas, to an ozone utilization device, such as a semiconductor manufacturing device, by means of an ozone supply pipe and equipment, which are made of stainless steel whose inner surface is subjected to passivation process. The passivation process comprises a room-temperature process using a high-concentration ozone gas with an ozone-to-oxygen ratio of 50vol.% or more, or a dry process such as high-temperature process using oxygen gas, or a wet process using nitrate, etc. Thus catalyic effects on the inner surface of piping that promote ozone decomposition reactions are reduced, so that autolysis of the ozones being transferred can be inhibited.

Kunihiko Koike
Goichi Inoue

JP532696A

January 28, 2002

January 17, 1996

Click for automatic bibliography generation  

Iwatani Corporation

F17D1/04; B01J4/00; (IPC1-7): F17D1/04; B01J4/00

JP60127205A
JP5287496A
JP533156A
JP6235058A
JP9196298A
JP92807A
JP8169704A
JP5106047A
JP977593A
JP5567506A
JP517164B2
JP6111881B2
JP517164B2

電子技術総合研究所，オゾンビーム発生装置，電子技術総合研究所い報，日本，株式会社オーム社，第５５巻第３号，３９５−４０１
電子技術総合研究所，オゾンを利用したホット粒子の発生と酸化物薄膜形成への応用，電子技術総合研究所い報，日本，株式会社オーム社，第５７巻第４号，３００−３１３

Juichi Kitatani

Previous Patent: CONTINUOUS REMOVAL OF HIGHER ALCOHOL FROM ALKYLPOLYSACCHARIDE

Next Patent: LUBRICATION OIL COOLING DEVICE OF ENGINE