To provide an ozone water manufacturing method for efficiently manufacturing ozone water of a high concentration.
The provided ozone water manufacturing method is an ozone water manufacturing method for manufacturing ozone water 20a scheduled to be used at a use point following the dissolution of ozone into ultrapure water obtained by further treating water obtained from a primary pure water system 2 where an ultraviolet oxidation treatment of oxidizing the water obtained from the primary pure water system 2 with ultraviolet rays at an intensity yielding a hydrogen peroxide concentration of 15.0 μg/L or above, a hydrogen peroxide removal treatment of removing hydrogen peroxide from the water having undergone the ultraviolet oxidation treatment so as to realize a hydrogen peroxide concentration of 10.0 μg/L or below, and an ozone dissolving treatment of dissolving ozone into the water having undergone the hydrogen peroxide removal treatment so as to realize an eventual ozone concentration of 30 mg/L or above are performed and where carbon dioxide is dissolved into the water before the execution of the hydrogen peroxide removal treatment or after the execution of the hydrogen peroxide removal treatment and before the execution of the ozone dissolving treatment or during the ozone dissolving treatment.
| JP2010240641A | 2010-10-28 | |||
| JP2005152803A | 2005-06-16 | |||
| JP2009112979A | 2009-05-28 |
Yasuo Fukuda
Yasuyuki Sakata