PURPOSE: To stabilize a glow discharge and to improve the efficiency in generating ozone by providing a dielectric on the surface of an anode, and furnishing an air circulating device with a space between the anode and a cathode as a part of the circulating passage.
CONSTITUTION: The anode 4 and the cathode 5 are arranged in a case 1 in opposition to each other, and the dielectric 11 is provided on the surface of the anode 4 opposed to the cathode 5. A passage case 12 is further fixed to the outside of the side face of the case 1, and a fan 14 for circulating air with the space between both electrodes 4 and 5 as a part of the circulating passage is provided in the passage case 12. Dried air is supplied between both electrodes 4 and 5 from an inlet 2, and ozone is generated by an electric discharge between both electrodes 4 and 5. Since the dielectric 11 is provided and the fan 14, filter 18, etc., for removing the spatter causing an arc discharge are furnished, the conversion of the glow discharge between both electrodes 4 and 5 to an arc discharge can be prevented.
OTA TOSHIYUKI
YAMASHITA ICHIRO
