Title:
【発明の名称】反射型マスクおよび該反射型マスクを用いた露光装置と露光方法
Document Type and Number:
Japanese Patent JP2546312
Kind Code:
B2
Inventors:
Masato Niibu
Suzuki Masayuki
Tsutomu Ikeda
Fukuda Keiaki
Shigetaro Ogura
Suzuki Masayuki
Tsutomu Ikeda
Fukuda Keiaki
Shigetaro Ogura
Application Number:
JP33522387A
Publication Date:
October 23, 1996
Filing Date:
December 29, 1987
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JPS5396677A | ||||
| JPS629632A |
Other References:
ＥｘｔｅｎｄｅｄＡｂｓｃｒａｃｔｓｏｆｔｈｅ１８ｔｈ（１９８６Ｉｎｔｅｒｎａｔｉｏｎｃｌ）ＣｏｎｆｅｒｅｎｃｅｏｎＳｏｌｉｄＳｔａｔｅＤｅｖｉｃｅｓａｎｄＭａｔｅｒｉａｌｓ，Ｔｏｋｙｏ，１９８６，ＰＰ．１７−２０
Attorney, Agent or Firm:
Takanashi Yukio