Title:
【発明の名称】多孔質静圧気体軸受の製造方法
Document Type and Number:
Japanese Patent JP2577644
Kind Code:
B2
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Inventors:
MYAZAKI TAKAOMI
Application Number:
JP26522189A
Publication Date:
February 05, 1997
Filing Date:
October 13, 1989
Export Citation:
Assignee:
CANON KK
International Classes:
F16C32/06; F16C33/14; (IPC1-7): F16C32/06; F16C33/14
Domestic Patent References:
| JP1156312U |
Attorney, Agent or Firm:
Tetsuya Ito (1 outside)