Title:
【発明の名称】イオン注入装置における混入イオンの分析方法
Document Type and Number:
Japanese Patent JP2754425
Kind Code:
B2
Inventors:
KATO ZENJI
Application Number:
JP30057690A
Publication Date:
May 20, 1998
Filing Date:
November 06, 1990
Export Citation:
Assignee:
FUJI DENKI KK
International Classes:
C23C14/48; H01J37/05; H01J37/317; H01L21/265; (IPC1-7): H01J37/317; H01J37/05; H01L21/265
Domestic Patent References:
| JP62115639A |
Attorney, Agent or Firm:
Shoji Shinobe