Title:
【発明の名称】平面光導波路の製造方法
Document Type and Number:
Japanese Patent JP2902640
Kind Code:
B2
Abstract:
A uniform planar optical waveguide is made by (a) depositing a lower cladding layer 402 on a substrate 400 and polishing the deposited surface; (b) depositing a core layer on the resultant structure of the step (a) and polishing the deposited surface; (c) patterning the core layer whose surface is polished in the step (b), to generate an optical waveguide; and (d) depositing an upper cladding layer on the optical waveguide formed through the patterning of the step (c). In the case of an arrayed waveguide demultiplexer (AWG DEMUX), the phase difference at each channel matches the intended value, thereby decreasing crosstalk.
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Inventors:
TEI ZENTA
Application Number:
JP19302998A
Publication Date:
June 07, 1999
Filing Date:
July 08, 1998
Export Citation:
Assignee:
SANSEI DENSHI KK
International Classes:
G02B6/13; C23C16/40; C23C16/453; C23C16/56; H01P3/10; H01P11/00; H01Q15/18; (IPC1-7): G02B6/13
Domestic Patent References:
| JP1039152A | ||||
| JP1039153A | ||||
| JP7159639A |
Attorney, Agent or Firm:
Hidekazu Miyoshi (1 outside)