Title:
【発明の名称】パラメータの値を求める方法
Document Type and Number:
Japanese Patent JP3008986
Kind Code:
B2
Abstract:
PCT No. PCT/DE92/00364 Sec. 371 Date Sep. 8, 1993 Sec. 102(e) Date Sep. 8, 1993 PCT Filed May 2, 1992 PCT Pub. No. WO92/19942 PCT Pub. Date Nov. 12, 1992.In a process for finding the value of parameters which change the resonance frequencies of microstructures wherein the microstructures include at least one membrane mounted at its periphery and wherein at least one resonance frequency of the microstructures is between 100 kHz and 100 MHz, the frequency of the characteristic resonance frequency of the microstructures is detected by exposing the microstructures to ultrasound and measuring the intensity of the ultrasound transmitted through, or reflected from, the microstructure and the value of the parameter is then determined by means of a calibration curve.
Inventors:
Schaumburg, Werner
Application Number:
JP50845292A
Publication Date:
February 14, 2000
Filing Date:
May 02, 1992
Export Citation:
Assignee:
Cologne Forschungs Zentrum Karlsruhe Gesellschaft Mitt Beschlenkle Haftung
International Classes:
H01H13/00; G01D21/02; G01H13/00; (IPC1-7): G01H13/00; G01B17/00; G01K5/00; G01L7/08
Attorney, Agent or Firm:
Toshio Yano (2 outside)