Title:
【発明の名称】低誘電率セラミック基板とグリーンシートの製造方法
Document Type and Number:
Japanese Patent JP3021586
Kind Code:
B2
Abstract:
Methods for preparing a green sheet and a glass ceramic substrate are herein disclosed. The object of these methods is to make green sheets and glass ceramic substrates practically acceptable, the green sheets and the glass ceramic substrates having a low dielectric constant and low scattering in properties, and the method comprises the steps of preparing a mixture of hollow silica microspheres, borosilicate glass powder and ceramic powder as a principal ingredient, adding a plasticizer, a binder and a solvent to the mixture, kneading the mixture and forming it into a green sheet, wherein the shell-thickness of the hollow silica microspheres is controlled so that the specific gravity of the hollow silica microspheres is approximately equal to that of the solvent and wherein an inorganic substance containing aluminum as a constituent element such as alumina, mullite or aluminum nitride is used as the ceramic powder for forming the green sheet; or the method further comprises the step of calcining the resulting green sheet.
Inventors:
亀▲崎▼ 洋
Masato Wakamura
Takao Yokouchi
Yoshihiko Imanaka
Nobuo Kamehara
Masato Wakamura
Takao Yokouchi
Yoshihiko Imanaka
Nobuo Kamehara
Application Number:
JP24650290A
Publication Date:
March 15, 2000
Filing Date:
September 17, 1990
Export Citation:
Assignee:
富士通株式会社
International Classes:
C04B38/08; C03C11/00; C03C14/00; C03C17/02; C03C17/25; C04B35/622; H01L21/48; H01L23/15; H05K1/03; H05K3/46; (IPC1-7): C04B38/08; C04B35/622; H01L23/15; H05K1/03; H05K3/46
Domestic Patent References:
| JP6183674A | ||||
| JP3237075A | ||||
| JP2239168A |
Attorney, Agent or Firm:
Teiichi Igeta