Title:
【発明の名称】結晶シリコン基板の製造方法
Document Type and Number:
Japanese Patent JP3057712
Kind Code:
B2
Inventors:
Ryuichi Kawase
Application Number:
JP14390990A
Publication Date:
July 04, 2000
Filing Date:
June 01, 1990
Export Citation:
Assignee:
Toppan Printing Co., Ltd.
International Classes:
H01L21/205; H01L21/336; H01L21/84; H01L29/78; H01L29/786; (IPC1-7): H01L21/205; H01L21/336; H01L29/786
Domestic Patent References:
| JP63239185A |